Materials 4H03

Thin Films Science and Engineering

Term I, 2015-2016

Instructor Room E-mail
Dr. Matthieu Bugnet ABB B150
TA Room E-mail
Steffi Woo JHE A406


Classroom ABB 271
(Monday 8:30, Wednesday 8:30, Friday 10:30)

COURSE WEBSITE: for course material, outline, assignments and announcements.

1) The Materials Science of Thin films, Milton Ohring, 2nd edition
This book is available at the University Bookstore (recommended).
Course handouts are available on AvenueToLearn

The aims to provide students with an advanced knowledge of the broad range of thin film
deposition methods, the technology of thin film deposition instrumentation, the growth
mechanisms in thin films and some applications.

At the end of the course, students are expected to show the ability to:
• Understand the differences in vacuum techniques and deposition methods.
• Understand the advantages and disadvantages of these methods.
• Select the synthesis techniques that are most suitable for a given application, including
characterization techniques.
• Assess the environmental impact of synthesis methods (some methods are more
environmentally friendly and less toxic)

MATLS 4H03 is an important part of your training as an engineer. In particular, the course will
allow you to:

  1. Gain specialized Engineering Knowledge including:
    (a) Vacuum, plasmas and vacuum technologies
    (b) Characteristics of different deposition methods
    (c) Growth mechanisms of films to obtain specific microstructure and properties

  2. Analyze problems
    (a) Identify deposition conditions to obtain given property of films

  3. Design systems
    (a) Design the components of vacuum and deposition systems suitable for a given task
    based on limitations of available systems.

  4. Use modern state of the art tools in order to:
    (a) Select the appropriate deposition technique for a particular application and use
    (b) Select the appropriate characterization methods to probe the structure/composition of

1. Fundamentals of vacuum technology
2. Physical vapour deposition methods
3. Chemical vapour deposition methods
4. Thin films growth mechanisms
5. Characterization of thin films (ellipsometry, resistivity)
6. Epitaxy and epitaxial growth
7. Electrical and optical properties of thin films

One class tests (week of 19th October, to be confirmed) 20%
Two Assignments 20%
Participation and attendance 10%
Final exam: This will assess the covered material in the lectures and the assignments 50%
Written work will have to be submitted in hard copy and electronic version for verification of
originality (see policy on Academic dishonesty below).


Week 1 Vacuum techniques, gases, technology, lab demonstration of vacuum systems
Week 2 Physical vapour deposition
Basics, techniques, sputtering
Week 3 Plasmas and implantation
Week 4 Sputtering, hybrid methods, Chemical vapour deposition
Week 5 Chemical vapour deposition, hybrid methods
Week 6 Characterization, Thickness measurement methods
Week 7 Thin film growth (continued)
Week 8 Microstructure diagrams, Epitaxy
Week 9 Epitaxy (and lab tour)
Week 10 Electrical Properties of thin films
Week 11 Electrical and optical properties of thin films
Week 12 Coatings technology

This schedule is tentative and subject to change depending on the progress of the class.
To ensure long-term learning, student participation and interaction are important not only in class but outside class hours.

Senate and the Faculty of Engineering require all course outlines to include the following reminders: The Faculty of Engineering is concerned with ensuring an environment that is free of all adverse discrimination. If there is a problem that cannot be resolved by discussion among the persons involved, individual are reminded that they should contact the Department Chair, the Sexual
Harassment Office or the Human Rights Consultant, as soon as possible. Students should be reminded that they should read and comply with the "Statement on Academic Ethics and the
Senate Resolution on Academic Dishonesty" as found in the Senate Policy Statements distributed at registration and available in the Senate Office.